Precision Positioning of a Sawyer Motor-driven Stage
نویسندگان
چکیده
منابع مشابه
A High-Precision, Magnetically Levitated Positioning Stage
High accuracy positioning stages with multiple degrees-of-freedom, or microsteppers, are ubiquitous in industrial manufacturing. These devices are used in probing and inspection systems, in the assembly of disk drive heads, and in semiconductor manufacturing. In semiconductor manufacturing, microsteppers are employed to accurately move silicon wafers in the photolithography process. To guarante...
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Preface This thesis describes the work I have done at Mapper Lithography B.V. in Delft, as a final project for my masters Precision and Microsystems Engineering at Delft University of Technology, faculty 3mE. This project is part of the process of designing a high-precision linear positioning stage for a wafer scanner using electron beam lithography. The first part of my work is focused on the ...
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A positioning system with long stroke and high precision by dualstage control was designed. The focus was on combining the long-stroke travel range of linear stage with high-precision characteristics of piezoelectric actuators. The control method used in the system was dynamic compensation type, where the error from linear stage becomes the input to the piezoelectric actuators. Positioning erro...
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This paper applies a combined precision stage to fabricate micro-structures by two-photon polymerization (TPP). The combined stage consists of PZT and stepper-motor stages to achieve precision positioning in long displacements. First, we derive the models of the stages by identification experiments. Second, we apply robust loop-shaping techniques to improve the positioning performance of the st...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering, Contributed Papers
سال: 2005
ISSN: 1881-8722,1348-8724
DOI: 10.2493/jspe.71.523